|Issuer:||AXCELIS TECHNOLOGIES INC (ACLS)|
|Original Submission Date:|
FALLON LYNNETTE C
C/O AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE BEVERLY, MA 01915
|Title of Security||Transaction Date||2a. Deemed Execution Date||Transaction Code||Shares||Acquired or Disposed||Price per share||5. Amount of Securities Beneficially Owned Following Reported Transaction||6. Ownership Form Direct or Indirect||Nature of Indirect Ownership|
|Title of Derivative Security||Conversion or Exercise Price of Derivative Security||Transaction Date||Deemed Execution Date||Transaction Code||Number of Derivative Securities Acquired (A) or Disposed of (D)||Date Exercisable||Expiration Date||Title and Amount of Securities Underlying Derivative Security||Price of Derivative Security||Number of derivative Securities Beneficially Owned Following Reported Transaction(s)||Ownership Form: Direct (D) or Indirect (I)||Nature of Indirect Beneficial Ownership|
|f1||of the shares held as of august 9, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 equity incentive plan and are subject to forfeiture.|