|Issuer:||AXCELIS TECHNOLOGIES INC (ACLS)|
|Original Submission Date:|
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE BEVERLY, MA 01915
|Title of Security||Transaction Date||2a. Deemed Execution Date||Transaction Code||Shares||Acquired or Disposed||Price per share||5. Amount of Securities Beneficially Owned Following Reported Transaction||6. Ownership Form Direct or Indirect||Nature of Indirect Ownership|
|Title of Derivative Security||Conversion or Exercise Price of Derivative Security||Transaction Date||Deemed Execution Date||Transaction Code||Number of Derivative Securities Acquired (A) or Disposed of (D)||Date Exercisable||Expiration Date||Title and Amount of Securities Underlying Derivative Security||Price of Derivative Security||Number of derivative Securities Beneficially Owned Following Reported Transaction(s)||Ownership Form: Direct (D) or Indirect (I)||Nature of Indirect Beneficial Ownership|
|STOCK OPTION (RIGHT TO BUY)||14.0||2021-08-30||deemed execution date||M||5,475 (d)||2020-11-15||2023-11-15||common stock 5,475||$14.00||0||direct|
|f1||of the shares beneficially owned by the executive on august 30, 2021, 40,711 shares were issuable on vesting of restricted stock units which are subject to forfeiture.|