Form Type: 4

SEC EDGAR Link
Accession Number:0001209191-21-053853
Date:2021-08-30
Issuer: AXCELIS TECHNOLOGIES INC (ACLS)
Original Submission Date:

Reporting Person:

LOW RUSSELL
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE BEVERLY, MA 01915

Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
Title of SecurityTransaction Date2a. Deemed Execution Date Transaction CodeSharesAcquired or DisposedPrice per share 5. Amount of Securities Beneficially Owned Following Reported Transaction 6. Ownership Form Direct or IndirectNature of Indirect Ownership
COMMON STOCK 2021-08-30 M 5,475 a $14.00 74,636 direct
COMMON STOCK 2021-08-30 S 3,305 d $50.63 71,331 direct
Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, convertible securities
Title of Derivative Security Conversion or Exercise Price of Derivative Security Transaction Date Deemed Execution Date Transaction Code Number of Derivative Securities Acquired (A) or Disposed of (D) Date ExercisableExpiration Date Title and Amount of Securities Underlying Derivative Security Price of Derivative Security Number of derivative Securities Beneficially Owned Following Reported Transaction(s) Ownership Form: Direct (D) or Indirect (I) Nature of Indirect Beneficial Ownership
STOCK OPTION (RIGHT TO BUY) 14.0 2021-08-30 deemed execution date M 5,475 (d) 2020-11-15 2023-11-15 common stock 5,475 $14.00 0 direct
Footnotes
IDfootnote
f1 of the shares beneficially owned by the executive on august 30, 2021, 40,711 shares were issuable on vesting of restricted stock units which are subject to forfeiture.

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